Automated visual inspection apparatus for detecting defects and

Details Automated visual inspection apparatus for detecting defects and Automated visual inspection apparatus for detecting defects and

1998-11-19

2000-06-06

Kelley, Christopher S.

Image analysis

Applications

Manufacturing or product inspection

348 88, G06K 900

Patent

active

060729007

ABSTRACT:
Apparatus for detecting etch defects in an object having a plurality of openings by generating an image signal of the object representing light intensity values of a plurality of pixels, processing the image signal to form data signals representing light intensity values of groups of pixels, filtering the data signals to remove signals representing the ends of the openings, and pairing two data signals when the groups of pixels represented thereby represent an etch defect.

REFERENCES:
patent: 4330775 (1982-05-01), Iwamoto et al.
patent: 4593309 (1986-06-01), Uno et al.
patent: 4930889 (1990-06-01), Van Donsekas et al.
patent: 5146509 (1992-09-01), Hara et al.

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