Fishing – trapping – and vermin destroying
Patent
1991-03-26
1993-11-16
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437235, 437238, 437240, 118715, 4272551, 4272552, 4272553, G01L 2100, G01L 2102, G01L 21302, G01L 21463
Patent
active
052623564
ABSTRACT:
A method of treating a substrate with substantially equal flow rates of treatment gases in a treatment chamber containing the substrate. Because the times during which the treatment gases pass through pipes are controlled, even when the flow rates of the treatment gases differ appreciably, the impurity concentration in a film near the interface between the substrate and the film reaches a desired concentration. Also, when the times during which the treatment gases pass through the pipes are short, the treatment gases are unlikely to adhere to the walls of the pipes. It is thus possible to reduce the frequency of dummy runs.
REFERENCES:
patent: 4100310 (1978-07-01), Ura et al.
patent: 4196232 (1980-04-01), Schnable
patent: 4217375 (1980-08-01), Adams
patent: 4369031 (1983-01-01), Goldman et al.
patent: 4401507 (1983-08-01), Engle
patent: 4446168 (1984-05-01), Kato et al.
patent: 4517220 (1985-05-01), Rose
patent: 4748135 (1988-05-01), Frijlink
patent: 4791005 (1988-12-01), Becker et al.
patent: 4812325 (1989-03-01), Ishihara et al.
patent: 4980204 (1990-12-01), Fujii et al.
patent: 5160542 (1992-11-01), Mihira et al.
Sze, VLSI Technology, McGraw-Hill, 1988, p. 249.
Everhart B.
Hearn Brian E.
Mitsubishi Denki & Kabushiki Kaisha
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