Spin-valve type thin film element and its manufacturing method

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G11B 5127

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active

061152242

ABSTRACT:
The object of the present invention is to solve the problems that inductive magnetic anisotropy of the free magnetic layer can not be directed along the track width direction because all the layers of the antiferromagnetic layer, pinned magnetic layer and free magnetic layer are deposited by applying a magnetic field along the height direction or, although the free magnetic layer is deposited while applying a magnetic field along the track width direction, the other layers are also deposited while applying a magnetic field along the height direction.
The problems described above can be solved by forming the antiferromagnetic layer out of an antiferromagnetic material that can cause an exchange coupling by a heat treatment, and by depositing the antiferromagnetic layer, pinned magnetic layer and free magnetic layer at room temperature while applying a magnetic field along the X-direction, followed by a heat treatment. The procedure above enables inductive magnetic anisotropy of the free magnetic layer to be properly aligned along the X-direction prior to depositing the hard vias layer.

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