Electromagnetic actuating mechanism

Details Electromagnetic actuating mechanism Electromagnetic actuating mechanism

1998-11-23

2000-09-05

Ramirez, Nestor

Electrical generator or motor structure

Dynamoelectric

Linear

310 42, H02K 4100

Patent

active

06114780&

ABSTRACT:
An apparatus and method for positioning a first stage relative to a second stage. An apparatus of the present invention comprises a motor system to move the first and second stages relative to each other and a motion control system to control the path of the stage being moved. One stage has a continuous surface with a continuous magnetizable region. Nonmagnetizable regions are uniformly patterned within the magnetizable region. A method of the present invention involves the construction of a stage by etching a plurality of though holes in a sheet and affixing the sheet to the top surface of a foundation. The present invention improves the accuracy and speed of a positioning stage.

REFERENCES:
patent: 4709174 (1987-11-01), Nakagawa
patent: 4922143 (1990-05-01), Gosdowski
patent: 5179304 (1993-01-01), Kenjo et al.

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