Stock material or miscellaneous articles – Composite – Of quartz or glass
Patent
1992-06-17
1995-01-03
Robinson, Ellis P.
Stock material or miscellaneous articles
Composite
Of quartz or glass
428336, 428446, 428448, 428450, 428688, 428698, 428699, 428704, B32B 1706
Patent
active
053785410
ABSTRACT:
A silicon thin film member according to the present invention comprises a supporting substrate and an a-Si thin film formed by plasma CVD and including hydrogen. The a-Si thin film has a distribution of hydrogen density in which a hydrogen content of the a-Si thin film has a maximum value of 1.times.10.sup.22 atoms/cm.sup.3 or more in a position 20 nm or less away from an interface between the a-Si thin film and the supporting substrate, and the maximum value of the hydrogen content is larger than a hydrogen content of the supporting substrate on the interface. The hydrogen content of the a-Si thin film decreases from the position toward the interface and decreases from the position in a direction from the supporting substrate to the a-Si thin film.
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Carlson, D. E. and Magee, C. W., "A SIMS Analysis of Deuterium Diffusion in Hydrogenated Amorphous Silicon", RCA Laboratories, Princeton, N.J. (Apr. 18, 1989), pp. 81-83.
Westerberg, L., Svensson L. E., Karlsson, E., "Stable Absolute Calibration Standards for Hydrogen Profile Analysis Using Nuclear Resonance Techniques", Nuclear Physics and Nuclear Solid State Physics Divisions, Department of Physics, University of Uppsala, Uppsala, Sweden, (1985), pp. 49-54.
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Ihara Hisanori
Nozaki Hidetoshi
Kabushiki Kaisha Toshiba
Robinson Ellis P.
Speer Timothy M.
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