Optical: systems and elements – Optical modulator – Light wave temporal modulation
Patent
1991-09-10
1997-03-25
Epps, Georgia Y.
Optical: systems and elements
Optical modulator
Light wave temporal modulation
359267, G02F 103
Patent
active
056150393
ABSTRACT:
The present invention provides an electro-optical element and its manufacturing method ideal for use in defect inspection devices for liquid crystal display substrates used in liquid crystal display panels. The electro-optical element of this invention possesses an electro-optical element, dielectric reflective film, transparent electrode, and transparent supporting substrate. These are united together by adhering the dielectric reflective film and transparent electrode edge to the electro-optical element. The electro-optical element is manufactured by consecutively affixing the transparent sheet with the transparent electrode, the electro-optical element, and transparent film with the dielectric reflective film to the transparent supporting substrate. Since the electro-optical element of this invention is equipped with a transparent electrode and dielectric reflective film, the optical properties of the electro-optical element change by the transmission of electricity to the transparent electrode and inspected body and creation of an electric field, and it can be used in defect inspection of an inspected body by measuring those changes.
REFERENCES:
patent: 4270847 (1981-06-01), Meyer
patent: 4500174 (1985-02-01), Conner
patent: 4761061 (1988-08-01), Nishiyama et al.
patent: 5170127 (1992-12-01), Henley
Epps Georgia Y.
Photon Dynamics, Inc.
Robbins Thomas
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