Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1992-12-08
1995-01-03
Williams, Hezron E.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
73 1D, G01P 1508
Patent
active
053775457
ABSTRACT:
A servo accelerometer uses a tunnel current sensor having a first sensing electrode coupled in fixed alignment with a frame and a second sensing electrode coupled to a proof mass. A position sensing circuit develops a sensing signal indicative of displacement of the proof mass. A feedback circuit provides an output signal and provides a feedback signal to electrostatic drive electrodes for applying an electrostatic repositioning force to the proof mass. The proof mass and frame are connected by a highly compliant suspension structure.
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Norling Brian L.
Woodruff James R.
Allied-Signal Inc.
Kwok Helen C.
Massung Howard G.
Williams Hezron E.
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