Method for making a closed gate MOS transistor with self-aligned

Metal working – Method of mechanical manufacture – Assembling or joining

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29576B, 148 15, 148187, 357 23, H01L 2126

Patent

active

042741939

ABSTRACT:
A method of manufacturing a closed gate MOS transistor having a self-aligned drain contact is presented which insures that the drain contact will have the minimum required geometry. The method employs a self-aligned procedure which insures that the drain contact will have the minimum dimensions to insure a high speed device.

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