Method of making a machine structures fabricated of mutiple micr

Details Method of making a machine structures fabricated of mutiple micr Method of making a machine structures fabricated of mutiple micr

1996-12-24

1998-06-09

Dutton, Brian

Semiconductor device manufacturing: process

Bonding of plural semiconductor substrates

216 2, 310 40MM, H01L 2130

Patent

active

057633185

ABSTRACT:
Machine structures each comprising a stack of a plurality of micromachine layers laminated together are presented, along with fabrication methods therefore. Each machine structure includes a movable member(s) defined from microstructure of at least one layer of the plurality of micromachine layers comprising the stack. During fabrication, the micromachine layers are separately formed using VLSI techniques and then subsequently laminated together in a selected arrangement in the stack to define the machine structure.

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