Optical waveguides – With optical coupler
Patent
1992-03-12
1993-09-28
Ullah, Akm E.
Optical waveguides
With optical coupler
25022711, G02B 626, G02B 620
Patent
active
052492443
ABSTRACT:
Disclosed are an optical device having an optical coupler and a method for fabricating the optical device. The optical device includes a semiconductor crystal and a waveguide formed on the semiconductor crystal. The waveguide includes an etched portion having a predetermined pattern and a predetermined depth. A re-grown portion is formed in the etched portion of the waveguide. A coupler portion containing a recess is formed in the re-grown portion. The coupler portion effects at least one of a branching and a combining of the light propagated through the waveguide. In a method for fabricating the device, the etched portion is formed typically by ion beam etching, and the recess is formed typically by focused ion beam etching. In the method, the etching and the re-growth are performed using the same mask material.
REFERENCES:
patent: 4589729 (1986-05-01), Bridges et al.
patent: 4708423 (1987-11-01), Erman et al.
patent: 4789214 (1988-12-01), Vilhelmsson et al.
patent: 4888785 (1989-12-01), Lee
"Mach-Zehnder Modulators and Optical Switches on III-V Semiconductors" by Erman et al., Journal of Lightware Tech. vol. 6, Jun. 1988 pp. 837-846.
Osinski, et al., "Miniature Integrated-Optic Beam Splitter in AlGaAs/GaAs Ridge Waveguides," Optical Fiber Communication Conference and Sixth International Conference on Integrated Optics and Optical Fiber Communication Technical Digest, Jan. 1987, one page.
Osinski, et al., "Miniature Integrated Optical Beam-Splitter in AlGaAs/GaAs Ridge Waveguides", Electronics Letters, vol. 23, No. 21, Oct. 1987, pp. 1156 through 1158.
Canon Kabushiki Kaisha
Ullah Akm E.
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