Megasonic jet cleaner apparatus

Details Megasonic jet cleaner apparatus Megasonic jet cleaner apparatus

1980-08-28

1982-04-27

Bashore, S. Leon

Cleaning and liquid contact with solids

Apparatus

With means to movably mount or movably support the work or...

134 1, 134184, 239102, 239592, B08B 300

Patent

active

043265537

ABSTRACT:
An apparatus for cleaning a surface of an article such as a semiconductor wafer with cleaning fluid includes a nozzle extending from a chamber for developing a jet of cleaning fluid. The fluid is pressurized and megasonic energy is applied to the fluid by a megasonic transducer. The nozzle is shaped to provide a ribbon-like jet of cleaning fluid vibrating at megasonic frequencies for impingement on the surface of the article.

REFERENCES:
patent: 2713998 (1955-07-01), Eicken
patent: 2738173 (1956-03-01), Massa
patent: 3114654 (1963-12-01), Nishiyama et al.
patent: 3373752 (1968-03-01), Inoue
patent: 3499792 (1970-03-01), Veith
patent: 3893869 (1975-07-01), Mayer et al.
patent: 3900162 (1975-08-01), Titus et al.
patent: 4111546 (1978-09-01), Maret
patent: 4178188 (1979-12-01), Dussault

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