Projection exposure apparatus

Details Projection exposure apparatus Projection exposure apparatus

1994-12-07

1996-06-25

Pendegrass, Joan H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 67, 355 71, H01L 21027, G03F 720

Patent

active

055305180

ABSTRACT:
A projection exposure apparatus includes illuminating optical means for illuminating a projection negative, and projection optical means for projection-exposing the projection negative illuminated by the illuminating optical means onto a substrate, the illuminating optical means including light source means for supplying exposure light, annular light source forming means for forming an annular secondary light source by the light from the light source means, and condenser means for condensing the light beam from the annular light source forming means on the projection negative, and is designed to satisfy the following condition:

REFERENCES:
patent: 4668077 (1987-05-01), Tanaka
patent: 4704027 (1987-11-01), Phillips
patent: 4831276 (1989-05-01), Hyakumura
patent: 4931830 (1990-06-01), Suwa et al.
patent: 4933754 (1990-06-01), Reed et al.
patent: 5160962 (1992-11-01), Miura et al.
patent: 5208629 (1993-05-01), Matsuo et al.
patent: 5253040 (1993-10-01), Kamon et al.
patent: 5329333 (1994-07-01), Noguchi et al.
patent: 5367404 (1994-11-01), Hayata

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