1983-10-17
1984-11-20
Larkins, William D.
357 34, 357 55, 357 59, 357 20, H01L 2704, H01L 2904, H01L 2972
Patent
active
044842112
ABSTRACT:
A semiconductor integrated circuit device in which the side surfaces of an emitter of an oxide isolated bipolar transistor are surrounded with insulating compounds or regions so that the capacitance between the emitter and base is lowered and a base is formed by the self-alignment so that the influence of an active base between an external base and the emitter can be made negligible. Thus the base resistance and parasitic capacitance are lowered.
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patent: 4318751 (1982-03-01), Horng
Cosand, "Very High Speed . . . Bipolar . . . ", IEEE International Electron Dev. Meeting, Technical Digest, Dec. 1973, pp. 35-37.
Fujita Tsutomu
Sakai Hiroyuki
Takemoto Toyoki
Yamada Haruyasu
Larkins William D.
Matsushita Electric - Industrial Co., Ltd.
Small, Jr. Charles S.
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