Method of identifying probe position and probing method in probe

Details Method of identifying probe position and probing method in probe Method of identifying probe position and probing method in probe

1995-03-09

1996-06-25

Wieder, Kenneth A.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324754, 414786, 348 94, 348 87, 356399, 437 8, G01R 3102

Patent

active

055303749

ABSTRACT:
A marker is provided outside the probe arrangement region of the lower surface of a probe card. In identifying positions of probes, the marker is recognized by a camera before the distal end of a reference probe is recognized. The camera is then moved from the position of the marker based on information about the relative position stored in advance to recognize the distal end of the reference probe. The camera is moved complementarily to make a reference point in the view of the camera and the distal end of the reference probe align with each other. Furthermore, where the same operation is performed for another reference probe, a deviation of the probes in the .theta. direction is calculated as .theta. correction data.

REFERENCES:
patent: 4786867 (1988-11-01), Yamatsu
patent: 4929893 (1990-05-01), Sato et al.
patent: 4966520 (1990-10-01), Yokota et al.

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