Method of pattern detection

Details Method of pattern detection Method of pattern detection

1985-01-08

1986-03-11

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Methods

Surface bonding and/or assembly therefor

156626, 156643, 427 35, 427 431, 427 531, 427 541, 430 5, 430296, 430945, G03C 500, B05D 306, B32B 3100

Patent

active

045753997

ABSTRACT:
An anti-reflective coating film is formed on a resist film formed on a substrate having a target pattern formed on its surface, thereby to reduce multiple reflection of light in said resist film. The distortion of the pattern detection signal due to multiple reflection in said resist film is thereby prevented to improve the mask positioning accuracy.

REFERENCES:
patent: 3922774 (1975-12-01), Lindmayer et al.
patent: 4178404 (1979-12-01), Allen et al.
patent: 4434224 (1984-02-01), Yoshikawa et al.

Affiliated with

Also associated with

Rating

Method of pattern detection does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of pattern detection, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of pattern detection will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2190860