Inductively coupled dual-stage magnetic deflection yoke

Details Inductively coupled dual-stage magnetic deflection yoke Inductively coupled dual-stage magnetic deflection yoke

1995-05-15

1996-06-25

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250398, H01J 37141

Patent

active

055302521

ABSTRACT:
A deflection yoke for controlling a charged particle beam, such as an electron beam, comprises a toroidal core, which may be ferromagnetic material or not, a major yoke winding, and a minor yoke winding. The major and minor yoke windings are arranged to minimize mutual inductance between the major winding and the minor winding. The major yoke winding is a toroidal winding about the core and said minor yoke winding is a saddle winding on said core. In one embodiment, the minor winding comprises a first saddle winding inside the toroidal core and a second saddle winding outside the toroidal core. A reactive shunt is connected across the first saddle winding or the second saddle winding. The reactive shunt provides a shunt current path to balance flex contribution in the core from the first and second saddle windings so that excitation of the minor yoke does not induce any excitation in the major yoke. The toroidal core may comprise one or two alternating stacks of ferromagnetic rings and non-ferromagnetic rings. This construction provides a core that does not perturb a lens field into which the deflection yoke may be placed. The non-ferromagnetic rings are made of a ceramic or other material having a coefficient of thermal expansion matched, or nearly so, to that of the ferromagnetic rings to prevent thermal stresses in the core.

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