Multi-layer wiring structure in semiconductor device and method

Fishing – trapping – and vermin destroying

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

437228, 437245, H01L 2144

Patent

active

055299563

ABSTRACT:
After an interlayer insulator film is deposited on a wiring conductor formed on a semiconductor device element and is then planarized, a first conducting film and a first insulating film are deposited in the named order. Thereafter, a through hole is formed, and a second conducting film and a second insulating film are deposited and then etched back so that these films remain on only a side wall surface of the through hole. Furthermore, the through hole is filled with a metal plating, and then, the etching-back is performed again. Thereafter, an upper level wiring conductor is plating-grown by supplying an electric current to-the first conducting film , and the second conducting film remaining on the side wall surface and the lower level wiring conductor.

REFERENCES:
patent: 3507756 (1970-04-01), Wenger
patent: 4898841 (1990-02-01), Ho
patent: 4977105 (1990-12-01), Okamoto et al.
patent: 5098860 (1992-03-01), Chakravorty et al.
patent: 5209817 (1993-05-01), Ahmad et al.
patent: 5254498 (1993-11-01), Sumi
patent: 5262352 (1993-11-01), Woo et al.
patent: 5312773 (1994-05-01), Nagashima
patent: 5358621 (1994-11-01), Oyama

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Multi-layer wiring structure in semiconductor device and method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Multi-layer wiring structure in semiconductor device and method , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multi-layer wiring structure in semiconductor device and method will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2188690

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.