Method of diffusing a metal through a silver electrode to form a

Details Method of diffusing a metal through a silver electrode to form a Method of diffusing a metal through a silver electrode to form a

1995-06-07

1996-06-25

Thomas, Tom

Fishing, trapping, and vermin destroying

437192, 437954, 148DIG15, 148DIG35, H01L 2128

Patent

active

055299547

ABSTRACT:
A semiconductor device includes a first metal film formed on a semiconductor substrate, a second metal film formed on the first metal film and containing silver as a main component, and a protective film containing a metal element of the first metal film and covering at least the upper surface of the second metal film. The protective film is formed by annealing in an atmosphere containing a predetermined element. That is, the metal element of the first metal film is diffused into the second metal film and reacts with the predetermined element in the atmosphere on the surface of the second metal film, thereby forming the protective film. Aggregation of silver is prevented in the presence of the protective film.

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