Method of fabricating lateral resonant tunneling structure

Details Method of fabricating lateral resonant tunneling structure Method of fabricating lateral resonant tunneling structure

1994-09-20

1996-06-25

Breneman, R. Bruce

Fishing, trapping, and vermin destroying

437180, 437228, 117 88, 20419212, 20429802, H01L 2144

Patent

active

055299520

ABSTRACT:
A resonant tunneling diode (400) with lateral carrier transport through tunneling barriers (404, 408) grown as a refilling of trenches etched into a transverse quantum well (410) and defining a quantum wire or quantum dot (406). The fabrication method uses angled deposition to create overhangs at the top of openings which define sublithographic separations for tunneling barrier locations.

REFERENCES:
patent: 4214966 (1980-07-01), Mahoney
patent: 4525919 (1985-07-01), Fabian
patent: 4872947 (1989-10-01), Wang et al.
patent: 4997779 (1991-03-01), Kohno
patent: 5362372 (1994-11-01), Tepman

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