Gas seal for semiconductor processing equipment

Seal for a joint or juncture – Seal between relatively movable parts – Relatively rotatable radially extending sealing face member

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277 27, F16J 1540

Patent

active

044835418

ABSTRACT:
During production of laser diodes, crystals on which the laser diodes are formed are subjected to two high temperature processes: diffusion and alloying. These steps are performed in a quartz process tube in an oxygen free atmosphere. At some stage in the process the crystal must be moved from a cool zone to a hot zone within the tube and this is done by means of a push rod which extends through an aperture in the diffusion tube. The conventional arrangement for sealing around the push rod acts to clamp the push rod in position. Thus, temporarily, while the push rod is being moved the seal must be partly released and its sealing action is inferior. To maintain the process atomsphere free of reactive gas there is proposed by the invention a mechanism for flooding the sealing area between the push rod and the process tube with an inert gas while the sealing means is temporarily released.

REFERENCES:
patent: 3868104 (1975-02-01), Hunt et al.
patent: 3975123 (1976-08-01), Schibbye
patent: 4245844 (1981-01-01), Pohl et al.
patent: 4399997 (1983-08-01), Broken
patent: 4412683 (1983-11-01), Haney
patent: 4431199 (1984-02-01), Iwane
patent: 4432556 (1984-02-01), Green et al.
patent: 4451046 (1984-05-01), Bliven

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