Method of applying an antireflective and/or dielectric coating

Details Method of applying an antireflective and/or dielectric coating Method of applying an antireflective and/or dielectric coating

1981-04-24

1982-08-31

Hoffman, James R.

Coating processes

Electrical product produced

Photoelectric

427160, 427164, 4272553, B05D 134

Patent

active

043472630

ABSTRACT:
A method of applying an antireflective and/or dielectric coating for solar energy cells by directing from different sources (1) a vapor comprising a metal halide or metal alkoxide and (2) oxygen to the heated surface of a silicon wafer. The metal is deposited on the silicon in the form of an oxide.

REFERENCES:
patent: 3533850 (1970-10-01), Tarneja et al.
patent: 3922774 (1975-12-01), Lindmayer et al.
patent: 4156622 (1979-05-01), Lindmayer

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