Exposure apparatus

Details Exposure apparatus Exposure apparatus

1994-05-25

1995-08-15

Pitts, Harold

Registers

Systems controlled by data bearing records

Credit or identification card systems

235375, G06F 1520, G06F 1524

Patent

active

054421632

ABSTRACT:
An exposure apparatus equipped with a substrate supervisory device is contained in an air-conditioned chamber with a front door. The device has a library for storing a plurality of reticle cases with respective reticles therein, a bar code reader for reading respective bar codes of the reticle cases and shifting means for shifting the bar code reader for the reading. When an operator stores the cases in the library by opening the door of the chamber, the bar code reader is retreated to a predetermined position and the shifting means will not be activated for the operator's safety.

REFERENCES:
patent: 4433547 (1984-02-01), Firey
patent: 4567361 (1986-01-01), Rosenthal
patent: 4715392 (1987-12-01), Abe et al.
patent: 5095195 (1992-03-01), Harman

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