Ion source producing a dense flux of low energy ions

Details Ion source producing a dense flux of low energy ions Ion source producing a dense flux of low energy ions

1979-01-30

1980-07-22

LaRoche, Eugene R.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

250423R, 313230, 313362, 3151119, H01J 2700

Patent

active

042141877

ABSTRACT:
An ion source supplying a dense flux of low energy ions containing very few neutral particles. It comprises: a microwave circuit in which an electromagnetic wave propagates along a direction ZZ, the conducting elements forming this circuit being arranged periodically and being ring-shaped, inlet means for a neutral gas at the center of the microwave circuit, this gas being ionized thanks to the energy supplied to it by the microwave, a magnetic field guiding the resulting plasma in the direction ZZ, and means for pumping the unionized atoms in a direction normal to the direction ZZ, all along the microwave circuit.

REFERENCES:
patent: 3408519 (1968-10-01), Etievant et al.
patent: 3476968 (1969-11-01), Omura
patent: 3999072 (1976-12-01), Takagi

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