Solid-state image pickup device with high melting point metal sh

Details Solid-state image pickup device with high melting point metal sh Solid-state image pickup device with high melting point metal sh

1991-11-26

1994-08-09

Limanek, Robert

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Electromagnetic or particle radiation

257437, 257659, H01L 2714, H01L 3100

Patent

active

053369190

ABSTRACT:
In a solid-state image pickup device, a high melting point metal film is used in a cell portion region (photoelectric conversion portion) as a light shielding film which defines an open area of a photoelectric conversion element and an aluminum film which is covered with a high melting point metal is used in a peripheral region as wiring.

REFERENCES:
patent: 4354104 (1982-10-01), Chikamura et al.
patent: 4556897 (1985-12-01), Yorikane et al.

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