Three-dimensional acceleration sensor and airbag using the same

Land vehicles – Wheeled – Attachment

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7351432, 3612832, 3612833, B60R 2132

Patent

active

054413001

ABSTRACT:
A three-dimensional acceleration sensor capable of detecting a small acceleration value and even an acceleration value amounting up to 100G occurring in the event of a collision comprises a diaphragm for linking a frame and a massive part and diaphragms and beams for linking the massive part and a central part. These elements are formed by working a single crystalline silicon plate. Gaps between the massive part and opposing electrodes are changed by acceleration applied to the massive part. A circuit connected to terminals detects the changes in gaps as changes in capacitances and determines direction and level of the applied acceleration.

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A New Modal Mode Controlling Method for a Surface Format Surrounding Mass Accelerometer, K. Yamada and T. Kuriyama, Sensor Research Laboratory, Microelectronics Research Laboratories, NEC Corporation, Shimokuzawa, Sagamihara, Kanagawa, Japan, pp. 655-658.

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