Spin coating of electrolytes

Details Spin coating of electrolytes Spin coating of electrolytes

1987-05-26

1989-01-03

Kaplan, G. L.

Chemistry: electrical and wave energy

Apparatus

Electrolytic

295701, 204425, 427240, G01N 2730

Patent

active

047955430

ABSTRACT:
Methods for spin coating electrolytic materials onto substrates are disclosed. More particularly, methods for depositing solid coatings of ion-conducting material onto planar substrates and onto electrodes are disclosed. These spin coating methods are employed to fabricate electrochemical sensors for use in measuring, detecting and quantifying gases and liquids.

REFERENCES:
patent: 4068019 (1978-01-01), Boeckl
patent: 4124411 (1978-11-01), Meuleman et al.
patent: 4267212 (1981-05-01), Sakawaki
IBM Technical Disclosure Bulletin; vol. 19, No. 3 (Aug. 1976) "Method of Depositing Pastes and Slurries", B. J. Foster and B. Narken, p. 857.
IBM Technical Disclosure Bulletin; vol. 18, No. 2 (Jul. 1975) "Striation-Free Resist Coating Process", E. R. Mondou and P. R. Schmidt, pp. 391-392.
IBM Technical Disclosure Bulletin; vol. 16, No. 5 (Oct. 1973) "Spin Coating Photoresist", P. W. Reed and L. R. Weaver, pp. 1535-1536.

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