Electronically addressed deformable mirror device

Optical: systems and elements – Optical modulator – Light wave temporal modulation

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359292, G02F 101

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active

056402660

ABSTRACT:
A plurality of first electrodes affixed to an insulating substrate is arranged in a matrix of p rows and q columns. Each first electrode is overlapped by a respective deformable reflective conductor. Each first electrode is electrically connected to a respective third switch terminal of a respective thin film transistor. Each transistor is affixed to the substrate. A suitable potential control means is provided to control the potential difference between each first electrode and the respective conductor in accordance with a input signal enabling a wavefront incident on the reflective conductors to be modulated in accordance with the information bearing signal.

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