Apparatus and method for photoluminescence analysis

Radiant energy – Luminophor irradiation

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250341, 2504591, G01J 300

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active

RE0328219

ABSTRACT:
An apparatus, for photo-luminescent analysis of the surface of crystalline silicon, is disclosed, in which the photons emitted from the sample are passed through a two-beam (or two-arm) interferometer, having the usual beamsplitter, fixed mirror, and movable mirror. The interferometer output is directed to a detector which is a germanium photo-diode, cooled in a Dewar, which also cools the initial electronic circuitry to which the detector output is input. Using the disclosed apparatus, methods are available for readily eliminating the negative effect of the electron-hole-dropler phenomenon, and for utilizing the [no-photon] no-phonon region of the spectrum to identify otherwise unidentified impurity (or dopant) materials.

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