Method and apparatus for surface roughness detection - using a m

Electricity: measuring and testing – Magnetic – Magnetic information storage element testing

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73105, 324235, 324252, G01B 734, G01R 3312, G01N 2772

Patent

active

056400896

ABSTRACT:
A magnetoresistive element is used to detect a surface roughness of an object, such as a magnetic recording medium, a photomask blank, a semiconductor wafer, and is assembled into a reproducing head which moves along a surface of the object and which can produce an electric signal related to the surface roughness. The reproducing head may be incorporated with a recording head into a head unit. The head unit can monitor a magnetic characteristic of the magnetic recording medium in addition to detection of the surface roughness, by recording a predetermined signal by the recording head and by reproducing the predetermined signal by the reproducing head.

REFERENCES:
patent: 4416144 (1983-11-01), Chen et al.
patent: 4532802 (1985-08-01), Yeack-Scranton et al.
patent: 5410439 (1995-04-01), Egbert et al.
patent: 5455730 (1995-10-01), Dovek et al.

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