Method and apparatus for processing a plate-like workpiece

Details Method and apparatus for processing a plate-like workpiece Method and apparatus for processing a plate-like workpiece

1986-10-28

1988-10-04

Griffin, Donald A.

Photocopying

Projection printing and copying cameras

Step and repeat

355 77, G03B 2742

Patent

active

047758775

ABSTRACT:
A step-and-repeat type exposure apparatus includes an X-Y stage for moving stepwise a workpiece such as a wafer relative to a projection lens system so that images of a pattern of an original such as a reticle are transferred onto different areas on the wafer in sequence. After exposures of such areas of the wafer that are included in one of plural regions of the wafer, the position of the wafer relative to the X-Y stage is shifted. Then, exposures of the areas included in another region of the wafer are effected. In another aspect, the step-and-repeat exposures of the wafer are effected along a direction inclined to the moving directions of the X-Y stage.

REFERENCES:
patent: 3566763 (1971-03-01), Knopf
patent: 3597078 (1971-08-01), Miyauchi
patent: 4530587 (1985-07-01), Kosugi et al.
patent: 4577957 (1986-03-01), Phillips
patent: 4583847 (1986-04-01), Battig et al.

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