Transparent ohmic contacts for Schottky diode optical detectors

Fishing – trapping – and vermin destroying

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437 3, 437 39, 437176, 437974, H01L 3116

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active

056396732

ABSTRACT:
An InP buffer layer is first formed upon an InP substrate; a thin layer of heavily doped InGaAs, a thick layer of light absorbing InGaAs, and a thin layer of InAlAs are thereafter sequentially grown upon the InP buffer layer. A light reflective Schottky barrier metallic layer is then applied to the InAlAs layer and the resulting device is inverted and affixed to a newly provided substrate, to thus shield and protect the sensitive Schottky contact. The InP substrate layers are thereafter removed and the now exposed thin, heavily doped InGaAs layer is coated with a transparent, electrically conductive layer of Indium-tin-oxide.

REFERENCES:
patent: 5053843 (1991-10-01), Choudhury et al.
patent: 5470761 (1995-11-01), McKee et al.
patent: 5472914 (1995-12-01), Martin et al.
patent: 5494833 (1996-02-01), Martin et al.
patent: 5532173 (1996-07-01), Martin et al.

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