Process for peeling protective film off a thin article

Details Process for peeling protective film off a thin article Process for peeling protective film off a thin article

1986-10-07

1988-10-04

Bell, Michael W.

Adhesive bonding and miscellaneous chemical manufacture

Methods

Surface bonding and/or assembly therefor

156230, 156249, 156344, B44C 117, B32B 3100

Patent

active

047754389

ABSTRACT:
A process for peeling a protective film off a thin article such as a silicon wafer is proposed. The film is peeled by sticking an adhesive tape to the protective film on the article and pulling it away from the article. The protective film is peeled only by the adhesive force of the adhesive tape.

REFERENCES:
patent: 4029536 (1977-06-01), Kovacs et al.
patent: 4285759 (1981-08-01), Allen et al.
patent: 4421586 (1983-12-01), Bargman
patent: 4466852 (1984-08-01), Beltz et al.
patent: 4508589 (1985-04-01), Tarui et al.

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