Surface acoustic waveguide device and manufacturing method

Optical waveguides – Directional optical modulation within an optical waveguide – Acousto-optic

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385129, 385147, G02B 610

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active

051877562

ABSTRACT:
The present invention relates to a surface acoustic wave element comprising a substrate, an optical waveguide layer formed on the aforesaid substrate to guide laser light from a laser light source, a surface acoustic wave portion for deflecting or modulating the laser light traveling through the aforesaid optical waveguide layer, a comb-shaped SAW electrode provided on the aforesaid optical waveguide layer to cause the aforesaid surface acoustic wave portion to generate surface acoustic wave, and a terminal provided on the aforesaid optical waveguide layer and connected to the aforesaid SAW electrode to apply a high-frequency alternating voltage thereto, wherein a protection cover is bonded by a viscoelastic adhesive having a refractive index smaller than that of the aforesaid optical waveguide layer to cover the aforesaid SAW electrode and surface acoustic wave portion with air space in such a manner that the aforesaid terminal is positioned outside thereof, and the manufacturing method of the surface acoustic wave element.

REFERENCES:
patent: 3655261 (1972-04-01), Chang
patent: 4182543 (1980-01-01), Wied et al.
patent: 4548464 (1985-10-01), Auracher et al.
patent: 5076654 (1991-12-01), Presby
Efficient Acoustooptical Coupling of Guided to Substrate Modes in a Combined Acoustical/Optical Channel Guide, IEEE Proc., IGWO 1989 pp. 138-141.
Waveguide Optical Deflector for an Optical Disk Tracking Actuator using a Surface Acoustic Wave Device, Applied Optics, vol. 29, No. 2, 1990.

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