Apparatus and method for loading and unloading wafers

Material or article handling – Device for emptying portable receptacle – Nongravity type

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414786, 414752, 414754, 414757, 414627, 414331, 414281, 414280, 414225, 414217, 414661, 118729, 118500, B65G 100

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active

047752815

ABSTRACT:
Apparatus for loading and unloading wafers including a support structure having associated with it a predetermined wafer engagement position at which wafers can be engaged by the processing machine, a temporary storage device mounted on the support structure for storing a wafer in position for pick up, the flat surfaces of the wafer being parallel to an X-axis and perpendicular to a Z-axis, a first wafer engagement member for carrying the wafer on the first engagement member between the temporary storage device and the engagement position, a first X-direction mover mounted on the support structure and operable to move the first engagement member parallel to the X-axis, a second wafer engagement member for carrying the wafer on the second engagement member between the temporary storage device and the engagement position, a second X-direction mover mounted on the support structure and operable to move the second engagement member parallel to the X-axis independent of the first engagement member, a Z-direction mover mounted on the support structure and operable to move the first and second engagement members in the Z-direction, and a controller to cause the first X-direction mover to move the first engagement member parallel to the X-axis toward the engagement position at the same time as or shortly after the second engagement member moves parallel to said X-axis away from the engagement position.

REFERENCES:
patent: 3823836 (1974-07-01), Cheney et al.
patent: 3868759 (1975-03-01), Hartleroad et al.
patent: 4457661 (1984-07-01), Flint et al.
patent: 4465416 (1984-08-01), Burkhalter et al.
patent: 4558983 (1985-12-01), Freeman et al.
patent: 4618292 (1986-10-01), Judge et al.
W. T. Anderson, "Workpiece Transfer Unit", Apr. 1976, IBM Technical Disclosure Bull.

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