Coherent light generators – Particular active media – Semiconductor
Patent
1993-11-05
1995-05-23
Davie, James W.
Coherent light generators
Particular active media
Semiconductor
372 36, 372 50, 372109, H01S 319
Patent
active
054187990
ABSTRACT:
A semiconductor laser device element substrate includes a plurality of semiconductor laser device elements arranged in an array on a semiconductor substrate, the array including a plurality of rows and a plurality of columns, laser resonator facets being located at the boundaries between respective rows of the semiconductor laser device elements, and element separation guiding grooves, for guiding separation of the substrate into a plurality of divided semiconductor laser devices, the grooves being located at the boundaries between the semiconductor laser device elements of the respective columns, wherein the element separation guiding grooves are arranged at positions on different straight lines running in the column direction for each group at least two adjacent rows. Therefore, even if some forces are applied to the substrate, the forces are not concentrated on a point, whereby wafer cracking can be prevented.
REFERENCES:
patent: 4672736 (1985-08-01), Westermeier
patent: 4883771 (1989-11-01), Kumabe et al.
patent: 5061974 (1991-10-01), Onodera et al.
Davie James W.
Mitsubishi Denki & Kabushiki Kaisha
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