Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1994-09-02
1997-03-04
Lusignan, Michael
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
134 2, 437228, 437946, 216 71, B05D 512, C03C 1500, H01L 21465
Patent
active
056077181
ABSTRACT:
This invention provides a polishing method including the steps of forming a film to be polished on a substrate having a recessed portion in its surface so as to fill at least the recessed portion, and selectively leaving the film to be polished behind in the recessed portion by polishing the film by using a polishing agent containing polishing particles and a solvent, and having a pH of 7.5 or more. The invention also provides a polishing apparatus including a polishing agent storage vessel for storing a polishing agent, a turntable for polishing an object to be polished, a polishing agent supply pipe for supplying the polishing agent from the polishing agent storage vessel onto the turntable, a polishing object holding jig for holding the object to be polished such that the surface to be polished of the object opposes the turntable, and a polishing agent supply pipe temperature adjusting unit, connected to the polishing agent supply pipe, for adjusting the temperature of the polishing agent.
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Hayasaka Nobuo
Matsuo Mie
Nakata Rempei
Okano Haruo
Sasaki Yasutaka
Kabushiki Kaisha Toshiba
Lusignan Michael
Talbot Brian K.
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