Multilayer conductive wire for semiconductor device and manufact

Electricity: conductors and insulators – Conduits – cables or conductors – Preformed panel circuit arrangement

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174268, 257747, 257748, 257750, 257775, H05K 100

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active

054441862

ABSTRACT:
A multilayer conductive wire is formed of a plurality of conductive layers stacked upon each other, and has a slit shaped groove extending in the direction intersecting the direction of stress in at least one conductive layer. With the groove mating with a protrusion in another conductive layer or a protrusion in an insulating film layer, a sliding phenomenon between the layers due to the stress can be restrained, so that a multilayer conductive wire free from destruction due to the sliding phenomenon caused by the stress and without losing conductivity can be provided.

REFERENCES:
patent: 4937641 (1990-06-01), Sunami et al.
patent: 5023699 (1991-06-01), Hara et al.
patent: 5084412 (1992-01-01), Nakasaki
patent: 5103268 (1992-04-01), Yin et al.
Patent Abstracts of Japan, vol. 11, No. 227 (E-526), Jul. 23, 1987 (JP62045150).
Patent Abstracts of Japan, vol. 15, No. 375 (E-1114), Sep. 20, 1991 (JP3149829).
Patent Abstracts of Japan, vol. 15, No. 375 (E-1114), Sep. 20, 1991 (JP3149828).

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