Micro-actuator

Details Micro-actuator Micro-actuator

1994-02-04

1995-05-23

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310317, H01L 4108

Patent

active

054184185

ABSTRACT:
A micro-actuator suitable for a piezoelectric film is described. A slow deformation and a rapid deformation are repeatedly produced in a piezoelectric film by generating a first voltage pattern V1 having an essentially sawtooth waveform between a pair of electrodes on one side of a wall-like member and a second voltage pattern V2 having an opposite polarity to that of the first voltage pattern V1 between a pair of electrodes on the other side of the wall-like member. As a result, the wall-like member responds by moving slowly in a first direction and rapidly in a second direction. An object placed on the wall-like member is moved in the first direction, because the object can follow the slow movement of the wall-like member but cannot follow its rapid movement.

REFERENCES:
patent: 4195243 (1980-03-01), Thaxter
patent: 4785177 (1988-11-01), Besocke
patent: 5043621 (1991-08-01), Culp
patent: 5262696 (1993-11-01), Culp
patent: 5268611 (1993-12-01), Culp
patent: 5283497 (1994-02-01), Culp
T. Furuhata et al., "Array-Driven Ultrasonic Microactuators", 1991 International Conference on Solid State Sensors and Actuators, Digest of Technical Papers (CAT. No. 91CH2817-5), pp. 1056-1059.

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