Purification process

Details Purification process Purification process

1993-10-20

1995-08-22

Cintins, Ivars

Liquid purification or separation

Processes

Ion exchange or selective sorption

210688, B01D 1500

Patent

active

054437369

ABSTRACT:
The invention is for a process of removing organic contaminants and multivalent metal ions from solution. The process comprises chelating multivalent metal ions in an organic solution to be purified and contacting the solution with activated carbon. The process is especially useful for removal of multivalent metal ions from a solution of photoresist components.

REFERENCES:
patent: 5073622 (1991-12-01), Wojtech et al.
patent: 5087370 (1992-02-01), Schultheis et al.
patent: 5234789 (1993-08-01), Favier, Jr. et al.
patent: 5320756 (1994-06-01), Winston

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