Optical position-measuring device having reference mark graduati

Details Optical position-measuring device having reference mark graduati Optical position-measuring device having reference mark graduati

1997-11-20

1999-11-02

Le, Que T.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

25023114, 25055929, 356356, H01J 314

Patent

active

059775394

ABSTRACT:
A position-measuring device for the determination of the relative position of two objects movable with respect to one another includes at least two graduation carriers connected to the movable objects on each of which, formed as chirp fields, are disposed reference mark graduation structures that serve to generate a defined signal at a known absolute position. From the scanning chirp field assigned to the scanning graduation carrier, the incident beams of a light source disposed on the illumination side and separable into at least two individual beams of differing orders of diffraction that strike at spatially separated scale chirp fields.

REFERENCES:
patent: 4776701 (1988-10-01), Pettigrew
patent: 5079418 (1992-01-01), Michel et al.
patent: 5428445 (1995-06-01), Holzapfel
patent: 5648658 (1997-07-01), Holzapfel et al.

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