Method for bi-layer programmable resistor

Semiconductor device manufacturing: process – Making passive device – Resistor

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438238, H01L 2702

Patent

active

059769432

ABSTRACT:
A programmable resistor is composed of two layers. A first layer of the programmable resistor has a substantially lower resistance than a second layer of the programmable resistor. The programmable resistor is programmed by placing a signal across the programmable resistor. A resulting current generated by the signal travels in parallel through the first layer of the programmable resistor and the second layer of the programmable resistor. The voltage of the signal is of a sufficient level so that a first portion of the resulting current which travels through the first layer causes a break in the first layer of the programmable resistor. However, the voltage of the signal is not of a sufficient level to allow a second portion of the resulting current which travels through the second layer to cause a break in the second layer of the programmable resistor.

REFERENCES:
patent: 5708291 (1998-01-01), Bohr et al.
Gail Robinson, PROM fuse design scales to sub-0.25 micron, EE Times, Sep. 29, 1997.

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