Scanning near-field optic/atomic force microscope in which imagi

Details Scanning near-field optic/atomic force microscope in which imagi Scanning near-field optic/atomic force microscope in which imagi

1995-03-22

1997-05-06

Westin, Edward P.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250306, 73105, H01J 314

Patent

active

056273657

ABSTRACT:
A radiated light of a light source for optical characteristic measurement is amplitude modulated by an optical modulator and directed into a light-propagating probe. A phase and intermittent rate of the optical modulator are adjusted by a phase shifter. A sample characteristic measuring light is radiated onto the surface of the sample from the distal end of the probe. A light transmitted through or scattered by the sample, or fluorescent light generated from the sample is directed into a photoelectric converter via an optical system. The light radiating area of sample characteristic measuring light can be efficiently modified to improve the resolution of a light characteristic image of the surface topography and optical characteristic of the sample at high resolution, without relying on the existence of transmissivity and conductivity in the sample.

REFERENCES:
patent: 5333495 (1994-08-01), Yamaguchi et al.
patent: 5357105 (1994-10-01), Harp et al.
patent: 5465046 (1995-11-01), Campbell et al.
Applied Physics Letters, vol. 60, No. 24, 15 Jun. 1992, New York, NY, pp. 2957-2959, R. Toledo-Crow et al., "Near-field differential scanning optical microscope with atomic force regulation".
SPIE, vol. 1639, 20 Jan. 192, Bellingham, WA, pp. 36-43, N.F. van Hulst et al., "Operation of a scanning near field optical microscope in reflection in combination with a scanning force microscope".
SPIE, vol. 1855, 1993, Bellingham, WA, pp. 58-66, P.J. Moyer et al., "Sheap force/reflection near-field scanning optical microscopy".
Ultramicroscopy, vol. 57, No. 2-3, Feb., 1995, Netherlands, pp. 141-146, H. Muramatsu et al., "Scanning near-field optic/atomic-fore microscopy".

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