Electron emitting device and process for producing the same

Details Electron emitting device and process for producing the same Electron emitting device and process for producing the same

1995-06-07

1997-05-06

Niebling, John

Semiconductor device manufacturing: process

Electron emitter manufacture

427 77, 445 24, 445 51, 313309, 313310, 313311, H01L 21465

Patent

active

056271115

ABSTRACT:
An electron emitting device causes electron emission by a current supply in a coarse resistor film. The coarse thin resistor film is composed at least of a coarse thin silicon film.

REFERENCES:
patent: 3936329 (1976-02-01), Kendall et al.
patent: 3990914 (1976-11-01), Weinstein et al.
patent: 4599076 (1986-07-01), Yokono et al.

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