Coating processes – Electrical product produced – Metallic compound coating
Patent
1996-02-21
1997-05-06
King, Roy V.
Coating processes
Electrical product produced
Metallic compound coating
427 79, 427 99, 4274193, B05D 512, B05D 136
Patent
active
056269064
ABSTRACT:
A preferred embodiment of this invention comprises a perovskite-seed layer (e.g. calcium ruthenate 40) between a conductive oxide layer (e.g. ruthenium oxide 36) and a perovskite dielectric material (e.g. barium strontium titanate 42), wherein the perovskite-seed layer and the conductive oxide layer each comprise the same metal. The metal should be conductive in its metallic state and should remain conductive when partially or fully oxidized. Generally, the perovskite-seed layer has a perovskite or perovskite-like crystal structure and lattice parameters which are similar to the perovskite dielectric layer formed thereon. At a given deposition temperature, the crystal quality and other properties of the perovskite dielectric will generally be enhanced by depositing it on a surface having a similar crystal structure. Undesirable crystal structure formation will generally be minimized and lower processing temperatures may be used to deposit the perovskite dielectric layer. Another benefit of this electrode system is that the perovskite-seed layer should do little or no reduction of the perovskite dielectric layer.
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Beratan Howard R.
Summerfelt Scott R.
Carlson Brian A.
Donaldson Richard L.
King Roy V.
Stoltz Richard A.
Texas Instruments Incorporated
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