Spin dryer

Details Spin dryer Spin dryer

1984-08-14

1987-01-20

Makay, Albert J.

Drying and gas or vapor contact with solids

Apparatus

With apparatus using centrifugal force

34 8, F26B 1118

Patent

active

046371460

ABSTRACT:
A spin dryer including a rotary stage for supporting a substrate to be dried, particularly adapted for use in producing semiconductor devices, and a stationary cover spaced from the substrate. The stationary cover has at least the same area as that of the substrate and is provided with a number of openings for charging a dry and dust-free gas onto the substrate, whereby oxidation and dust-contamination of the substrate are avoided.

REFERENCES:
patent: 949930 (1910-02-01), Hutchins
patent: 3740866 (1973-06-01), Williams
patent: 4027686 (1977-06-01), Shortes et al.
patent: 4257637 (1981-03-01), Hassan et al.
patent: 4313266 (1982-02-01), Tam
patent: 4350562 (1982-09-01), Bonu
patent: 4445281 (1984-05-01), Aigoo
K. Schade, "Halbleiter Technologie", vol. 1, 1st edition, 2/1981, VEB Verlag Technik, Berlin, p. 84.
European Search Report.
IBM Technical Disclosure Bulletin, vol. 22, No. 11, Apr. 1980, NY.
IBM Technical Disclosure Bulletin, vol. 17, No. 1, Jun. 1974, NY.

Affiliated with

Also associated with

Rating

Spin dryer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Spin dryer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Spin dryer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2128128