Process for manufacturing a semiconductor device having a non-po

Details Process for manufacturing a semiconductor device having a non-po Process for manufacturing a semiconductor device having a non-po

1981-07-31

1983-09-27

Rutledge, L. Dewayne

Metal working

Method of mechanical manufacture

Assembling or joining

357 52, H01L 2156

Patent

active

044060530

ABSTRACT:
A process for manufacturing a semiconductor device comprises the step of annealing a porous passivation layer which is deposited on the surface of the device and which covers metallization layers fabricated thereon, by irradiating a laser beam on the passivation layer so as to densify the passivation layer, while the laser beam scans the surface of the passivation layer.

REFERENCES:
patent: 3725309 (1973-04-01), Ames et al.
patent: 3881971 (1975-05-01), Greer et al.
patent: 4059461 (1977-11-01), Fan et al.
patent: 4229232 (1980-10-01), Kirkpatrick
patent: 4284659 (1981-09-01), Jaccodine et al.
patent: 4321104 (1982-03-01), Hasegawa et al.
Auston, D. H. et al., "Lasers for Material Processing Applications", in Bell Laboratories Record, Jul./Aug. 1979, pp. 188-189.
Auston, D. H. et al., "New Role for the Laser", in Bell Laboratories Record, Jul./Aug. 1979, pp. 187-191.

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