Process for making stoichiometric mixed metal oxide films

Coating processes – Measuring – testing – or indicating

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427226, 4271262, 4271263, 4274193, 4274192, 427379, 427380, 427240, B05D 302

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058856480

ABSTRACT:
Oxide materials having a composition described by the formula SrBi.sub.2.00- Ta.sub.2.00-x Nb.sub.x O.sub.9, where x ranges from 0.00 to 2.00 and is controlled to within about 1%, are provided having improved high temperature performance. A batch of the desired composition is initially prepared by conventional processes to provide a nominal composition that may be close to the desired composition, but not the exact desired composition. A portion of the batch is processed to form a thin film, the stoichiometry of which is then analyzed. The batch composition is then modified by adding thereto a quantity of one or more of the constituents to bring the batch composition to the desired stoichiometry. Further improved high temperature performance is achieved with values of x within the range of about 0.10 to 1.9, and more preferably, about 0.4 to 0.7, and most preferably about 0.56. The thus-modified metal organic acid salt solutions provide ceramic thin films having improved electrical properties (particularly consistent properties from batch-to-batch, improved ferroelectric remnant polarization, and much improved high temperature performance) as compared to the thin films prepared from unmodified solutions. The present invention provides for new materials, particularly new niobium-substituted, bismuth-layered structured materials and a process to make these materials on a consistent batch-to-batch basis.

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C.A-Paz de Araujo et al, "Fatigue-free ferroelectric capacitors with platinum electrodes", Nature, vol. 374, pp. 627-629 (Apr. 1995).
J.Y. Mantese et al, "Characterization of potassium tantalum niobate films formed by metalorganic deposition", Journal of Applied Physics, vol. 72, No. 2, pp. 615-619 (15 Jul. 1992).

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