Micromachined rate and acceleration sensor

Details Micromachined rate and acceleration sensor Micromachined rate and acceleration sensor

1998-08-14

1999-11-02

Brock, Michael

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

438 50, G01P 344

Patent

active

059748796

ABSTRACT:
A monolithic substrate for acceleration and angular rate sensing. The substrate comprises a support frame, and a first accelerometer formed in the substrate. The first accelerometer has a proof mass including first and second opposite edges. A flexure connects the first edge of the proof mass to the support frame. The flexure defines a hinge axis for the proof mass. The first accelerometer further includes a torsion stabilizing strut coupling a portion of the proof mass to the frame.

REFERENCES:
patent: 5005413 (1991-04-01), Novack et al.
patent: 5456110 (1995-10-01), Hulsing
patent: 5476819 (1995-12-01), Warren
patent: 5760305 (1998-06-01), Greiff
patent: 5796001 (1998-08-01), Greiff et al.

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