Double crucible crystal growing apparatus

Details Double crucible crystal growing apparatus Double crucible crystal growing apparatus

1978-09-21

1980-02-26

Bernstein, Hiram H.

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Including specific material of construction

156608, B01J 1718

Patent

active

041906314

ABSTRACT:
The disclosure is directed to a double crucible Czochralski crystal semiconductor growing apparatus (10). An inner crucible (14) floats in a melt within an outer crucible (13) and a single crystal semiconductor billet (23) is pulled from the melt (16) in the inner crucible. An elongated tubular member (26), having at least one small aperture (33) in the wall thereof, provides a channel between the outer and inner crucibles. The tubular member (26) permits flow of the melt in the outer crucible (14) to the inner crucible (13) while inhibiting the diffusion of dopant material from the inner to outer crucible while any gas in the member will pass through the aperture (33).

REFERENCES:
patent: 2892739 (1959-06-01), Rusler
patent: 2944875 (1960-07-01), Leverton
patent: 2977258 (1961-03-01), Dunkle
patent: 3015592 (1962-01-01), Leopold
patent: 3025191 (1962-03-01), Leverton
patent: 3067139 (1962-12-01), Goorissen
patent: 3206286 (1965-09-01), Bennett
patent: 3305484 (1967-02-01), Burmeister
patent: 3627499 (1971-12-01), LeDuc
patent: 3637439 (1972-01-01), DeBie
patent: 4036595 (1977-07-01), Lorenzini
Solid-State Electronics, 1960, vol. 5, pp. 131-134-Valcic.
Journal of Applied Physics, vol. 29, No. 8, 8158, pp. 1241-1244, Leverton.

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