Method of manufacturing a multilayered metallization structure i

Fishing – trapping – and vermin destroying

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437192, 437203, H01L 2128, H01L 21283

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active

051927144

ABSTRACT:
A method of manufacturing a semiconductor device includes the steps of forming a first insulating layer having a hole on a substrate, selectively forming a conductive layer in the hole, selectively forming a second insulating layer on the first insulating layer, patterning the second insulating layer, and forming an interconnection layer in an opening portion of the second insulating layer formed by patterning so as to be electrically connected to the conductive layer.

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patent: 5068207 (1991-11-01), Manocha et al.
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patent: 5104694 (1992-04-01), Saito et al.

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